控制按钮通常不用于非常重要的操作。因此,它们不受控制密码的保护。然而,通过监控它们的输出操作数,为安全可靠起见用户可以动态地激活控制按钮或使之失效。每个控制按钮给出它自己的灵活逻辑操作数,控制按钮1(7)接通。
PALL FILTER CARTRIDGE PN#T90081000300 ITEM#FLHF200M3F 3
TEL TOKYO ELECTRON 1181-000524-12 PCB ASSY MC-31137 A8S
TEL TOKYO ELECTRON 1181-000393-18 PCB ASSY REV 1C 101F
APPLIED MATERIALS 0200-01570 RING SILICON EXTENDED COVE
WHITE KNIGHT SPARES RBAP100-1
SMC 60-254066-00 GATE VALVE,(R),KIT,SLT REPAIR XGT200-3
PORTER MFC D2000I-M042 IPA 1.0 .14 ML/MIN LIQIUD FLOW M
Semitool Verteq Rotor A182-50M/MB/MC,H-Bar 600R0516-501
Advantest Extender Board BGS-026818
MYKROLIS MM06083004 FC2902MEP5-T MFC N2 5 SLPM MASS FLO
TEL TOKYO ELECTRON 1181-000308-17 PCB ASSY WAFER COUNTE
LAM 853-032908-001 R VALVE TURBO BYPASS REPAIRED REV B
Aera FC-D980C MFC SF6 100sccm MASS FLOW CONTROLLER
AERA AMAT FC-981C 3030-06966 HE 10 SLM TC FC-981SBC
AERA AMAT FC-981C 3030-06966 HE 10 SLM TC FC-981SBC
AERA FC-D980C MFC S5R4V-15JW 20sccm N2 MFC REP MASS
UNIT MFC UFC-1661C N2 10SCCM MULTIFLO
UNIT MFC UFC-1661C N2 1SLM MULTIFLO MASS FLOW CONTROLLE
UNIT MFC UFC-1661C N2 2000 SCM MULTIFLO MASS FLOW CONTR